Is Musk About to Disrupt EUV Lithography?

Some bloggers have posted messages claiming that, based on information released by TeraFab, Elon Musk appears to be pursuing the FEL (Free Electron Laser) route, aiming to disrupt the traditional monopoly of EUV.

Subsequently, Elon Musk’s reply seemed to corroborate this claim.

Of course, this is only speculation and does not represent the truth. However, we believe it is worth discussing.

We must acknowledge that free-electron lasers (FELs) and particle accelerators are by no means new technologies. For many years, companies, research institutions, and universities have owned and operated particle accelerators to generate tiny subatomic particles such as protons, neutrons, and quarks. These systems are typically used in physics and other scientific applications. Free-electron lasers (FELs) have long existed. As described, an FEL is essentially a high-power light source that uses electrons to generate light of various wavelengths. A particle accelerator is a system that propels charged particles.