Free Electron Lasers and the Birth of the Beamline Tycoon

Andrew Côté: So then why would Terafab need a Free Electron Laser, and why wouldn’t they just use what ASML does currently, laser-tin droplet ablation? To answer this we should start at the beginning: the fundamental physics of semiconductor photolithography. Laser-tin droplet ablation has low efficiency, requires one light source per scanner, and yield quality […]