Intel Foundry Advances Future Logic Scaling with Manufacturable 2D Transistors and High NA EUV Integration

Intel Foundry has demonstrated concrete momentum in de-risking 2D field-effect transistors as a future scaling path beyond silicon, through long-term collaboration with Imec . Results presented at IEDM show a world-first, 300 mm fab-compatible integration of key 2DFET modules, including source/drain contacts and gate stacks, using transition-metal dichalcogenide channels (WS₂ and MoS₂ for n-type,…