IEDM2025 Tutorial - Atomic layer deposited atomically thin In₂O₃ transistors for BEOL logic and memory applications

The IEDM 2025 T3 tutorial session titled “Atomic-layer-deposited atomically thin In₂O₃ transistors for BEOL logic and memory applications” will focus on recent progress in oxide semiconductor thin-film transistor (TFT) technologies designed for back-end-of-line (BEOL) 3D integration. The work is closely associated with Professor Peide (Peter) Ye’s group at Purdue University, which has been leading…